Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

40 in

Product Type

Filter Cartridges

Gasket / O-Ring Material

Fluorocarbon Elastomer

Filter Media

Polypropylene

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer

Product ID: CLR540M8V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer

Product ID: NXA0540UM23V
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer product photo

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer

Product ID: NXA1040UM3V
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer

Product ID: NXA140UM3V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer

Product ID: NXA540UM8V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT140UM3V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-ring

Product ID: NXT2040UM18V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE fin end external 226 O-rings

Product ID: NXT2540UM7V
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-ring

Product ID: NXT4040UM18V
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT540UM3V
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches, Fluorocarbon Elastomer

Product ID: CLR7540M8V
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
See All Attributes
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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