Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Cartridge Length (Metric)

508 mm

Poly-Fine® II Filter Cartridge, PFT520USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT520USM7W480

Product ID: PFT520USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Oenopure™ Filter Cartridges, AB2GB7WH4

Product ID: AB2GB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Hydrophillic Polyethersulfone
Effective Filtration Area (Metric cm²)
1.2 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
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This product is currently not available. Please contact us for more information.

Profile® II Filter Cartridge 20 in, 5 µm

Product ID: RM2F005W
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
8 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Maximum Differential Pressure
4 bard (60 psid)
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Emflon® PFAW Filter Cartridge, 0.2µm, 20 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB2PFA7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket O-Ring Code
H4
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Claris® Filter Cartridge, CLR120W480

Product ID: CLR120W480
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket O-Ring Code
Blank
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Micro-Carbon™ II Series Filter 20 in, 5 µm

Product ID: C20PPHP
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Outer shell - Porous, high density polyethylene (70 µm nominal)
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Hercuprene
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Poly-Fine® II Filter Cartridge, PFT1020USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT1020USM7W480

Product ID: PFT1020USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Fluorodyne® II Filter Cartridges, 0.2µm, 20in, Single Open End Code 7, Silicone Elastomer O-ring

Product ID: AB2FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0 µm
Membrane Material
Polyvinylidene fluoride (PVDF)
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket O-Ring Code
H4
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Filter 20" Profile Star 1,5µm Food & Bev

Product ID: AB2A0157WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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This product is currently not available. Please contact us for more information.

Nexis® T Series Filter Cartridges, Polypropylene, 5 µm, 20 in., Silicone Elastomer, M7

Product ID: NXT520UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone Elastomer
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Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, Nitrile

Product ID: PFT320UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm

Profile® UP Filter Cartridges, PUY2UY100WJ

Product ID: PUY2UY100WJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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22 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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