Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Filter Media

Polypropylene

Claris® Filter Cartridge, CLR130W480

Product ID: CLR130W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
Blank
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Poly-Fine® II Filter Cartridge, PFT0820UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT0820UEW480

Product ID: PFT0820UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Claris® Filter Cartridge, 10 µm, 40 in, Single Open Ended with Fin End and External 222 O-rings

Product ID: CLR1040M8WE480
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Ethylene Propylene Rubber
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Poly-Fine® II Filter Cartridge, PFT04540USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04540USM7W480

Product ID: PFT04540USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT04530USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04530USM7W480

Product ID: PFT04530USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II Filter Cartridge, PFT1030USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT1030USM7W480

Product ID: PFT1030USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Profile® Star Filter Cartridge, AB2A0507WH4

Product ID: AB2A0507WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Profile® Star Filter Cartridge, AB3A0307WH4

Product ID: AB3A0307WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial, No Bubble Test

Product ID: PFT0820US
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Claris® Filter Cartridge, 1 µm, 30 in, Single Open End with Fin End, 2 Locking Tabs and External 226 O-rings

Product ID: CLR130M7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Poly-Fine® II Filter Cartridge, PFT0810USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT0810USM7W480

Product ID: PFT0810USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.8 µm

Nexis® T Series Filter Cartridges, Polypropylene, 10 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT1030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes
87 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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