Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industrial Manufacturing

Product Sub Type

Depth Filters

Product Type

Filter Cartridges

CULLIGAN 00445072 885

Product ID: CULLIGAN0044S00001
Unit of Measure
24/EA
Min Order Qty
24

NPL CTRG AB2 PROFILE NYLON 050 C7 H4

Product ID: ABGN2FN0507H4NPL
Unit of Measure
1/EA
Min Order Qty
1

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer

Product ID: AB3Y40018H
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® II, Filter Cartridges, Polypropylene, Length 20 Inches

Product ID: RM2F070H21
Unit of Measure
48/EA
Min Order Qty
48
Removal Rating
7 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches

Product ID: NXT20020U
Unit of Measure
10/EA
Min Order Qty
10
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 5 inches

Product ID: NXT505U
Unit of Measure
60/EA
Min Order Qty
60
Micron
50 micron

ME3310FPY13H 132

Product ID: ME3310FPY13H132
Unit of Measure
24/EA
Min Order Qty
24

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 inches, EPDM

Product ID: NXA104UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
EPDM
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This product is currently not available. Please contact us for more information.

RLS2FPS100

Product ID: RLS2FPS100
Unit of Measure
12/EA
Min Order Qty
12

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR530M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Profile® Nylon, Filter Cartridges, Removal Rating 10 μm, Nylon

Product ID: RGN29FN100
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Nylon
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm

Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 10 inches, silicone, M5 - DOE, internal 120 O-rings (retrofits 213 O-ringstyle)4

Product ID: NXT12010UM5S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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1,107 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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