Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Sub Type

Pleated Depth Filters

Product Type

Filter Cartridges

Profile® Star, FilterCartridges, Removal Rating 1.5 μm, Polypropylene, Length 30 Inches

Product ID: AB3A0153H1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, EPDM, Double-Open End (DOE)

Product ID: XLD3TFUE147
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
No code
End Configuration
No Code - Double-Open End (DOE)
Gasket O-Ring Code
E
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AB4UY0207H

Product ID: AB4UY0207H
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 4 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD34UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® XLD Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: XLD2020USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® XLD Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated fluorocarbon elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: XLD2010UFM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
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AB4UY0603J

Product ID: AB4UY0603J
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, silicone, DOE industrial

Product ID: XLD1020US
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Element 1" PROFILE STAR UNICAP 0.8µm NPL

Product ID: H1A1A0081JNPL
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Profile® UP, Filter Cartridges, Removal Rating 40 μm, Length 30 Inches, Ethylene Propylene

Product ID: AB3UY4007J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene
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CTRG PRFLSTAR PIH 40" PPRO 070

Product ID: ME3310CPN40Z
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Profile® Star Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches

Product ID: AB2A0307J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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152 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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