Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Availability

In Stock

Product Sub Type

Pleated Depth Filters

Product Type

Filter Cartridges

PUY1UY045H

Product ID: PUY1UY045H
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® XLD Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: XLD4020USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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PUY2UY020H4

Product ID: PUY2UY020H4
Unit of Measure
1/EA
Min Order Qty
1

Profile® UP Filter Cartridges, Removal Rating 50 μm, Length 20 inches

Product ID: AB2UY5007H1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
50 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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Profile® UP Filter Cartridges, Removal Rating 70 μm, Length 20 inches

Product ID: AB2UY7007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, Nitrile, DOE industrial

Product ID: XLD320UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Nitrile
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Profile® UP Filter Cartridges, Removal Rating 4.5 μm, Length 20 inches, FluorocarbonElastomer

Product ID: AB2UY0457H
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® UP, Filter Cartridges, Removal Rating 4.5 μm , Length 30 Inches

Product ID: AB3UY0453J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene
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Profile® UP Filter Cartridges, Removal Rating 20 μm, Length 20 inches, silicone

Product ID: AB2UY2007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
See All Attributes

Profile® UP Filter Cartridges, Removal Rating 40 μm, Length 20 inches

Product ID: AB2UY4008PH1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
See All Attributes

Poly-Fine® XLD Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, silicone, DOE industrial

Product ID: XLD1020US
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes
11 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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