Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Product Sub Type

String Wound Filters

Product Type

Filter Cartridges

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Polyester, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Polyester, Length 30 Inches

Product ID: E050AW30A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 20 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 20 Inches, Polypropylene

Product ID: U100AW20U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, 304 stainless steel, with Core Cover

Product ID: C001AW20AC
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, 316 stainless steel, Bulk packaging

Product ID: P010RW30S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 316 stainless steel, Bulk packaging

Product ID: C010AW20S
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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100P20U

Product ID: 100P20U
Unit of Measure
24/EA
Min Order Qty
24

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 19.5 Inches, 304 stainless steel, Bulk packaging

Product ID: C005AW195A
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 19.5 Inches, 316 stainless steel, with Extended Core, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 19.5 Inches, 316 stainless steel, with Extended Core, Bulk packaging

Product ID: U010AW195SEC1S
Unit of Measure
10/EA
Min Order Qty
10
DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 20 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 20 Inches, 304 stainless steel

Product ID: U075AW20A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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FILTER CANISTER LOWER MAINTENANCE ROOM product photo

FILTER CANISTER LOWER MAINTENANCE ROOM

Product ID: CC17074E02S
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CC13377C08

Product ID: CC13377C08
Unit of Measure
1/EA
Min Order Qty
1

100U30U

Product ID: 100U30U
Unit of Measure
20/EA
Min Order Qty
20
180 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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