Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Cartridge Length (Imperial)

29.25 in

Product Type

Filter Cartridges

Gasket / O-Ring Material

NA

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 29.25 inches

Product ID: NXT1502925U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
150 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches

Product ID: NXA102925U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 29.25 inches

Product ID: NXA302925U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 29.25 inches

Product ID: NXT752925U30MM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 7 μm, Polypropylene, Length 29.25 inches

Product ID: NXT72925U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
7 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches

Product ID: NXT102925U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 inches

Product ID: CLR102925
Unit of Measure
12/EA
Min Order Qty
12
Length
74.3 cm / 29.25 in
Micron
10 micron

Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches, DOE industrial (no end caps)

Product ID: NXA32925U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 29.25 inches

Product ID: NXA12925UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 29.25 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 29.25 inches, DOE industrial (no end caps)

Product ID: NXT752925U
Unit of Measure
10/EA
Min Order Qty
10
Micron
75 micron

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 29.25 inches

Product ID: NXT2002925U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 29.25 inches

Product ID: NXT1202925U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes
22 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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