Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Industrial Manufacturing

Industries

Oil & Gas

Cartridge Length (Imperial)

10 in

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, 316 stainless steel

Product ID: G100A10S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 10 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 10 Inches, Polypropylene

Product ID: U020A10U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel

Product ID: G005A10S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches

Product ID: NXA4010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
40 micron
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, Electrolytic tin plated steel

Product ID: C010A10T
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess

Product ID: NXT110UM20E
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron
DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, Polypropylene

Product ID: U003A10U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, Nitrile

Product ID: PFT02510UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA510UM3S
Unit of Measure
30/EA
Min Order Qty
30
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE industrial (no end caps)

Product ID: NXA2010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
20 micron
DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 10 inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 200 μm, Length 10 inches

Product ID: C200A10T
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 10 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Bleached cotton, Length 10 Inches, 316 stainless steel, Bulk packaging

Product ID: C010A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
18 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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