Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Oil & Gas

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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, 304 stainless steel

Product ID: C100A10A
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 10 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN04510UN
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 20 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 20 Inches

Product ID: F020AW20S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA130UM3S
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT530UH21
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 40 Inches, Polypropylene

Product ID: U020AW40U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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6 Items
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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