Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

NXT 1-20U-DOEE

Product ID: NXT120UDOEE
Unit of Measure
24/EA
Min Order Qty
24

WFN 1.2-9.75UF-M10 300

Product ID: WFN12975UFM10300
Unit of Measure
1/EA
Min Order Qty
1

R1F003

Product ID: R1F003TIMONIUM
Unit of Measure
24/EA
Min Order Qty
48

PUY1UY200H

Product ID: PUY1UY200H
Unit of Measure
1/EA
Min Order Qty
1
Claris, Polypropylene, 75 micron, 20 inch product photo

75um, 20", DOE

Product ID: CLR7520
Unit of Measure
24/EA
Min Order Qty
24
Length
50.8 cm / 20 in
Micron
75 micron

R3FYM

Product ID: R3FYMTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

PRS200H21

Product ID: PRS200H21
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

WF3P02018J

Product ID: WF3P02018JTIMONIUM
Unit of Measure
24/EA
Min Order Qty
24

WFN 0.45-10US-M20 300

Product ID: WFN04510USM20300
Unit of Measure
1/EA
Min Order Qty
1

Profile® Star Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches, Ethylene Propylene, double O-ring with flat end

Product ID: AB2A0303J
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 3
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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NXA 0.5-20U-M3E product photo

Nexis, NXA, 0.5 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA0520UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
C030AW30U product photo

C030AW30U

Product ID: C030AW30U
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
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318 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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