Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Microelectronics

Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3 product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3

Product ID: PFT0210UEM3BLK513
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

20" Ultipor GF+ 1µm, DOE with EPR gaskets

Product ID: MCY1002U010ZJ
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

MPGH02120

Product ID: MPGH02120400
Unit of Measure
1/EA
Min Order Qty
1

CRTG EA92F2MS

Product ID: EA92F2MS
Unit of Measure
1/EA
Min Order Qty
1

DFA3001J400

Product ID: DFA3001J400
Unit of Measure
1/EA
Min Order Qty
1

WFN 0.45-20UN 300

Product ID: WFN04520UN300
Unit of Measure
1/EA
Min Order Qty
1

VFTR200-10M3S 300

Product ID: VFTR20010M3S300
Unit of Measure
1/EA
Min Order Qty
1

AB1UVI3EHF

Product ID: AB1UVI3EHF
Unit of Measure
1/EA
Min Order Qty
1

PUY2U220ZJ

Product ID: PUY2U220ZJ
Unit of Measure
1/EA
Min Order Qty
1
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, Nitrile (standard gaskets) product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, Nitrile (standard gaskets)

Product ID: PFT0210UNBBLK
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

WFN 0.45-30UE 300

Product ID: WFN04530UE300
Unit of Measure
1/EA
Min Order Qty
1

Filter 10" HDC II 6µm

Product ID: MCY1001J060J
Unit of Measure
24/EA
Min Order Qty
24
35 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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