Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Microelectronics

Availability

In Stock

NXA 2-20U-M3E product photo

Nexis, NXA, 2 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA220UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
2 micron

RLS1FPS200

Product ID: RLS1FPS200
Unit of Measure
1/EA
Min Order Qty
1

RM2F005H21-COA

Product ID: RM2F005H21COATIMMD
Unit of Measure
24/EA
Min Order Qty
48

Filter 10" Profile Star 1µm

Product ID: AB1A0103J
Unit of Measure
6/EA
Min Order Qty
6

RM3F050H21

Product ID: RM3F050H21TIMONIUM
Unit of Measure
48/EA
Min Order Qty
48

DFA3001J400

Product ID: DFA3001J400
Unit of Measure
1/EA
Min Order Qty
1

AB2P01019J

Product ID: AB2P01019JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
U010A10U product photo

U010A10U

Product ID: U010A10U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes
U025A9.75U-1PK product photo

U025A9.75U-1PK

Product ID: U025A975U1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
See All Attributes

Filter 10" Profile Star 5µm

Product ID: AB1A0503J
Unit of Measure
1/EA
Min Order Qty
1

PUY2U220ZJ

Product ID: PUY2U220ZJ
Unit of Measure
1/EA
Min Order Qty
1

AB1Y0503J

Product ID: AB1Y0503JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
34 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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