Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Cartridge Length (Metric)

1016 mm

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 304 stainless steel

Product ID: RT001AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT540UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXA140UM8S
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 316 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, 316 stainless steel, Individually wrapped

Product ID: G005AW40S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 40 Inches, Polypropylene

Product ID: U010AW40U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 40 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 40 Inches, 316 stainless steel, Bulk packaging

Product ID: RT100AW40S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT340UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 40 Inches, 304 stainless steel

Product ID: RT075AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 40 μm, GlassFiber, Length 40 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 40 μm, GlassFiber, Length 40 Inches

Product ID: F040AW40S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene, Hydrocarbon rubber, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene, Hydrocarbon rubber, Bulk packaging

Product ID: U005AW40UEM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 40 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 40 Inches

Product ID: F020AW40A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
98 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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