Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Sub Type

Pleated Filters

Cartridge Length (Imperial)

4 in

Product Type

Filter Cartridges

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 4 Inches

Product ID: DFNT0454UN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, FEP encapsulated Fluorocarbon Elastomer Orings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, FEP encapsulated Fluorocarbon Elastomer Orings

Product ID: PFT024UFM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, Fluorocarbon Elastomer

Product ID: PFT024UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer

Product ID: PFT0454UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm

Duo-Fine® , Filter Cartridges, Removal Rating 0.45 μm, Length 4 Inches, Nitrile

Product ID: DFN0454AN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 4 Inches, EPDM product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 4 Inches, EPDM

Product ID: PFT084UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer

Product ID: PFT104UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 4 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN0454AN317
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer

Product ID: PFT54UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Discontinued

This part is no longer available. Please contact us for more information.

Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 4 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN104AN
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT304UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 4 Inches, EPDM product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 4 Inches, EPDM

Product ID: PFT54UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Discontinued

This part is no longer available. Please contact us for more information.
21 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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