Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Gasket / O-Ring Material

Nitrile

Product Use

Pre-Filtration

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: PFT0820UNM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial

Product ID: PFT230UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, Bulk packaging product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial, Bulk packaging

Product ID: PFT04510UNBBLK
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, Nitrile, SOE flat closed end external 222 O-ring product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: PFT1040UNM18
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 Inches, Nitrile, product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 Inches, Nitrile,

Product ID: PFT540UNSI
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial

Product ID: PFT04510UN44
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial

Product ID: PFT330UN831
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 µm
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3N
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 Inches, Nitrile, DOE industrial

Product ID: PFT1010UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 10 Inches, Nitrile

Product ID: PFT210UN
Unit of Measure
30/EA
Min Order Qty
30
Micron
2 µm
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, Nitrile (standard gaskets) , M3 product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, Nitrile (standard gaskets) , M3

Product ID: PFT0210UNM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
NXT 1-20U-DOEN product photo

Nexis, NXT, 1 μm, 50.8 cm (20 in), DOE with elastomer gasket seals and end caps, Nitrile gasket

Product ID: NXT120UDOEN
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
81 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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