Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Use

Pre-Filtration

Poly-Fine® II Filter Cartridge, PFT520USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT520USM7W480

Product ID: PFT520USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches

Product ID: CLR540
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
5 micron
Poly-Fine® II Filter Cartridge, PFT510UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT510UEW480

Product ID: PFT510UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Poly-Fine® II Filter Cartridge, PFT0810UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT0810UEW480

Product ID: PFT0810UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 39 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 39 inches

Product ID: CLR3039
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
30 micron
Poly-Fine® II Filter Cartridge, PFT02530UESIW480 product photo

Poly-Fine® II Filter Cartridge, PFT02530UESIW480

Product ID: PFT02530UESIW480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Silicone Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, Silicone Elastomer

Product ID: PFT02520USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
Claris, Polypropylene, 75 micron, 9.875 inch product photo

Claris, Polypropylene, 75 micron, 9.875 inch

Product ID: CLR759875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
75 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches

Product ID: CLR530
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
5 micron

Fluorodyne® II Filter Cartridges, AB1FSD7WH4

Product ID: AB1FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Hydrophilic polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric m²)
0.55 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
See All Attributes

Claris® Filter Cartridge, CLR530W480

Product ID: CLR530W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
Blank
See All Attributes
Poly-Fine® II Filter Cartridge, PFT02510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT02510USM7W480

Product ID: PFT02510USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
18 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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