Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

20 in

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 Inches, silicone, SOE fin end external 226 O-rings

Product ID: PFT3020USM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, EPDM, DOE industrial

Product ID: PFT0220UE513
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II Filter Cartridge, PFT520USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT520USM7W480

Product ID: PFT520USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings, SOE fin end external 222 O-rings

Product ID: PFT1020UTM8
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 20 Inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: PFT04520UNM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 20 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 20 Inches, Polypropylene

Product ID: U100AW20U
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, 304 stainless steel, with Core Cover

Product ID: C001AW20AC
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer, DOE industrial

Product ID: PFT0820UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

HDC® II Filter Cartridges, Length 20 inches

Product ID: AB2J0063H1
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
0.6 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, 316 stainless steel, Bulk packaging

Product ID: C010AW20S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes

Ultipor® GF Plus Filter Cartridges, Removal Rating 2 μm, Length 20 inches

Product ID: AB2U220Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 Inches, silicone, DOE industrial

Product ID: PFT3020US
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
559 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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