Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

EPDM

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, EPDM, Double-Open End (DOE)

Product ID: XLD3TFUE147
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
No code
End Configuration
No Code - Double-Open End (DOE)
Gasket O-Ring Code
E
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Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 Inches, EPDM

Product ID: PFT340UE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
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Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 4 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD34UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT0530UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 5 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT105UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
Cartridge Length (Metric)
12.7 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA5TFUDOEE47
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
5 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - DOE with elastomer gasket seals and end caps
Cartridge Type
NXA
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Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings

Product ID: CLR1030M8E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-ring

Product ID: NXT5010UM18E
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, EPDM, SOE fin end external 226 O-rings

Product ID: NXT140UM7E
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 10 inches, EPDM, M18 - SOE flat closed end, external 222 O-ring

Product ID: NXT20010UM18E
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 20 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT7520UM3E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Poly-Fine® II Filter Cartridge, PFT510UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT510UEW480

Product ID: PFT510UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
131 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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