Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Gasket / O-Ring Material

EPDM

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 9.75 Inches, EPDM, DOE industrial

Product ID: PFT08975UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 20 Inches, EPDM, DOE industrial

Product ID: PFT0220UE513
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 Inches, EPDM, DOE industrial

Product ID: PFT10010UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, EPDM, Double-Open End (DOE)

Product ID: XLD3TFUE147
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
No code
End Configuration
No Code - Double-Open End (DOE)
Gasket O-Ring Code
E
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Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 Inches, EPDM

Product ID: PFT340UE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
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Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.75 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT3975UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
NXA 1-30U-DOEE product photo

Nexis, NXA, 1 μm, 76.2 cm (30 in), DOE with elastomer gasket seals and end caps, EPDM gasket

Product ID: NXA130UDOEE
Unit of Measure
24/EA
Min Order Qty
24
Micron
1 micron
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 225 O-ring product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 225 O-ring

Product ID: PFT1030UEM22
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: CLR1040M3E
Unit of Measure
12/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3 product photo

PolyFine-II Filter Cartridge, Highly asymmetric polysulfone, 0.2 µm, 10 in, EPDM, M3

Product ID: PFT0210UEM3BLK513
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 225 O-ring product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 Inches, EPDM, SOE fin end external 225 O-ring

Product ID: PFT1040UEM22
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm

Poly-Fine® XLD Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 4 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: XLD34UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
EPDM
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329 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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