Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

20" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGT20Z
Unit of Measure
12/EA
Min Order Qty
12

LP6F

Product ID: LP6F
Unit of Measure
4/EA
Min Order Qty
4

MCY1001W003J 254

Product ID: MCY1001W003J254
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPN40H

Product ID: ME3310CPN40H
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

ME3310CPT40H

Product ID: ME3310CPT40H
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPT30H

Product ID: ME3310CPT30H
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPY13H 132

Product ID: ME3310CPY13H132
Unit of Measure
1/EA
Min Order Qty
1

Profile® II Filter Cartridge

Product ID: ME3310FPN30H
Unit of Measure
24/EA
Min Order Qty
24

ME3310FPR40H 132

Product ID: ME3310FPR40H132
Unit of Measure
12/EA
Min Order Qty
12

CRTG R19F300

Product ID: R19F300
Unit of Measure
24/EA
Min Order Qty
24

RF-Style 19" Profile II 40µm

Product ID: R19F400
Unit of Measure
24/EA
Min Order Qty
24
Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium product photo

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F100TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
See All Attributes
432 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English