Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

RGN N100 35" SPECIAL LENGTH

Product ID: WR35A720J0
Unit of Measure
12/EA
Min Order Qty
12

MCY1001W003J 254

Product ID: MCY1001W003J254
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPS30H

Product ID: ME3310CPS30H
Unit of Measure
1/EA
Min Order Qty
1

CRTG R19F300

Product ID: R19F300
Unit of Measure
24/EA
Min Order Qty
24

RF-Style 19" Profile II 40µm

Product ID: R19F400
Unit of Measure
24/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM3F030H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Element 1" PROFILE STAR UNICAP 20µm

Product ID: H1A1A2001J
Unit of Measure
1/EA
Min Order Qty
1

Element 1" PROFILE STAR UNICAP 0.8µm NPL

Product ID: H1A1A0081JNPL
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

PROFILE ELEMENT

Product ID: HC3300FHD30M
Unit of Measure
1/EA
Min Order Qty
1

30" NYLON PROFILE II CARTRIDGE

Product ID: HC3300FHN30M
Unit of Measure
12/EA
Min Order Qty
24

HC3300FPB10MY509

Product ID: HC3300FPB10MY509
Unit of Measure
3/EA
Min Order Qty
3

CTRG PROFILE PIH RF 40" 400

Product ID: HC3300FPR40M
Unit of Measure
12/EA
Min Order Qty
12

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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