Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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AB3NFP319J 906

Product ID: AB3NFP319J906
Unit of Measure
24/EA
Min Order Qty
24

AB3P01019J-FEM

Product ID: AB3P01019JFEMTIMMD
Unit of Measure
24/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 Inches, silicone, Polypropylene Cage

Product ID: AB3Y0057H4
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Silicone
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Profile® II, FilterCartridges, Polypropylene, Length 30 Inches, silicone

Product ID: AB3Y2007H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: AB3Y20018H13
Unit of Measure
24/EA
Min Order Qty
48
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
Cartridge Outer Diameter (OD) (Metric)
7 cm
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer

Product ID: AB3Y40018H
Unit of Measure
24/EA
Min Order Qty
48
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, silicone, Polypropylene Cage

Product ID: AB3Y3007H4
Unit of Measure
12/EA
Min Order Qty
24
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Silicone
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Profile® II, FilterCartridges, Polypropylene, Length 30 Inches, EPDM, Polypropylene Endcaps

Product ID: AB3Y40018J
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
EPDM
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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This product is currently not available. Please contact us for more information.

Filter 40" Profile II 0,5µm product photo

Filter 40" Profile II 0,5µm

Product ID: AB4Y0057J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

AB4Y03018J

Product ID: AB4Y03018J
Unit of Measure
12/EA
Min Order Qty
24

AB4Y10018J

Product ID: AB4Y10018J
Unit of Measure
12/EA
Min Order Qty
24

Filter 40" Profile II 5µm

Product ID: AB4Y05018J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

70 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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