Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Applications

Final Filtration/Microbial Stabilization

Palltronic® Compact Touch Carry Case

Product ID: CT001-CCT
Unit of Measure
1/EA
Min Order Qty
1

Palltronic® Compact Touch External Power Supply, CT001-EXTPWR

Product ID: CT001-EXTPWR
Unit of Measure
1/EA
Min Order Qty
1
Adapter Info
Includes EU, UK, US, AU adaptors

Palltronic® Compact Touch Thermal Printer Paper, CT001-PRTPAPER

Product ID: CT001-PRTPAPER
Unit of Measure
1/EA
Min Order Qty
1
Paper
Thermal
Paper Roll Diameter
45 mm
Paper Roll Length
25 m
Paper Roll Width
58 mm

External USB-Printer Compact Touch A

Product ID: CT001-USBPRTA
Unit of Measure
1/EA
Min Order Qty
1

Palltronic® Compact Touch Integrity Test Device for final membrane filters

Product ID: CT001
Unit of Measure
1/EA
Min Order Qty
1

Palltronic® Red Pneumatic Tubing (2m) with Stäubli fittings, CT001-INTUBING

Product ID: CT001-INTUBING
Unit of Measure
1/EA
Min Order Qty
1
Connections
Staubli Nipple
Length (m)
2 m

FBT Sanitary housing for eight cartridge filters - 762 mm (30”)

Product ID: FBT083G47H43A
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
810 mm
Cartridge Lock
Bayonet-Lock
Cartridge Style
AB Code 7
Design Pressure (barg)
-1/10 Barg @ -10/150 T°C
Food Contact Compliant
Yes
Housing Height (Metric)
1428 mm
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7 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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