Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Claris®

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 9.75 Inches, 304 stainless steel

Product ID: C010A975A
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, Polypropylene

Product ID: C010AW20U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 20 Inches, Polypropylene

Product ID: C020AW20U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
20 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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AVS1M30

Product ID: AVS1M30
Unit of Measure
24/EA
Min Order Qty
24

AVS20M30

Product ID: AVS20M30
Unit of Measure
24/EA
Min Order Qty
24

AVS50M9.75

Product ID: AVS50M975
Unit of Measure
72/EA
Min Order Qty
72

AVS5M30

Product ID: AVS5M30
Unit of Measure
24/EA
Min Order Qty
24

AVS5M9.75

Product ID: AVS5M975
Unit of Measure
72/EA
Min Order Qty
72

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 9.875 inches

Product ID: CLR509875
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches, SOE plastic spring assembly saw cut end product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches, SOE plastic spring assembly saw cut end

Product ID: CLR5040XK
Unit of Measure
12/EA
Min Order Qty
12

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR510M7S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, DOE with elastomer gasket seals & end caps

Product ID: CLR510DOES
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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219 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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