Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

DFT Classic®

K10A10U-1PK 430 product photo

K10A10U-1PK 430

Product ID: K10A10U1PK430
Unit of Measure
1/EA
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1
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Individually wrapped
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K5A20U-1PK 430 product photo

K5A20U-1PK 430

Product ID: K5A20U1PK430
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10/EA
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10
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Individually wrapped
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K3A20U-1PK 430 product photo

K3A20U-1PK 430

Product ID: K3A20U1PK430
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, 304 stainless steel, Bulk packaging

Product ID: GU010A10A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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GW005A40SE-1PK 246 product photo

GW005A40SE-1PK 246

Product ID: GW005A40SE1PK246
Unit of Measure
10/EA
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10
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Individually wrapped
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GW005A20SE-1PK 246 product photo

GW005A20SE-1PK 246

Product ID: GW005A20SE1PK246
Unit of Measure
10/EA
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10
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Individually wrapped
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GW010A39.5SE-1PK 246 product photo

GW010A39.5SE-1PK 246

Product ID: GW010A395SE1PK246
Unit of Measure
10/EA
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10
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Individually wrapped
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GW025A20SE-1PK 246 product photo

GW025A20SE-1PK 246

Product ID: GW025A20SE1PK246
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Polyester, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Polyester, Length 30 Inches

Product ID: E005AW30A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Polyester, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Polyester, Length 30 Inches

Product ID: E050AW30A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Polyester, Length 10 Inches

Product ID: E010A10A
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polyester
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Discontinued

This part is no longer available. Please contact us for more information.
E100AW30S product photo

E100AW30S

Product ID: E100AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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422 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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