Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

DFT Classic®

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 40 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 40 Inches

Product ID: P025AW40A
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P150A10U product photo

P150A10U

Product ID: P150A10U
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PERMI-L 7.68-U-VENT-P product photo

PERMI-L 7.68-U-VENT-P

Product ID: PERMIL768UVENTP
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PERMI-L 70-RT-A-S 569 product photo

PERMI-L 70-RT-A-S 569

Product ID: PERMIL70RTAS569
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PERMI-L 57-U-A-R 624 product photo

PERMI-L 57-U-A-R 624

Product ID: PERMIL57UAR624
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PERMI-L 57-U-A-SM product photo

PERMI-L 57-U-A-SM

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PERMI-L SM VENT FILTER product photo

PERMI-L SM VENT FILTER

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PERMI-L 70-U-A-S product photo

PERMI-L 70-U-A-S

Product ID: PERMIL70UAS
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K3A20U-1PK 430 product photo

K3A20U-1PK 430

Product ID: K3A20U1PK430
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K5A20U-1PK 430 product photo

K5A20U-1PK 430

Product ID: K5A20U1PK430
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MW 0.75-10S-1PK 246 product photo

MW 0.75-10S-1PK 246

Product ID: MW07510S1PK246
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Nylon, Length 10 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Nylon, Length 10 Inches

Product ID: N001A10A
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422 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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