Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Nexis®

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT2010UDOEE
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT2010UM18F
Unit of Measure
60/EA
Min Order Qty
60
Micron
20 micron

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXT2020UDOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT2020UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT2010UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXT2020UM3S
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT2020UM7S
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 29.25 inches

Product ID: NXT202925U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT2030UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXT2030UM8E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT2030UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXT2030UM3S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
See All Attributes
667 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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