Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Nexis®

Product Type

Filter Cartridges

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, SOE flat closed end external 222 O-rings

Product ID: NXT5010UM3T
Unit of Measure
60/EA
Min Order Qty
60
Micron
50 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXA520UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches

Product ID: NXT20020U
Unit of Measure
10/EA
Min Order Qty
10
Micron
200 micron

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 19.5 inches

Product ID: NXT25195U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 5 inches

Product ID: NXT505U
Unit of Measure
60/EA
Min Order Qty
60
Micron
50 micron

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 inches, EPDM

Product ID: NXA104UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
EPDM
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This product is currently not available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 120 μm, Polypropylene, Length 10 inches, silicone, M5 - DOE, internal 120 O-rings (retrofits 213 O-ringstyle)4

Product ID: NXT12010UM5S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
120 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT540NM3V181
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
End Configuration
M3 - SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0)4
Cartridge Type
NXT
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Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches, silicone

Product ID: NXA340UM8S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, SOE metal spring/polypropylene cap saw cut end

Product ID: NXT130USI
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT330UH21
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXA2010UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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681 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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