Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Poly-Fine®

MPF2230F002EH1

Product ID: MPF2230F002EH1
Unit of Measure
1/EA
Min Order Qty
1

MPGH02120

Product ID: MPGH02120400
Unit of Measure
1/EA
Min Order Qty
1
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT230UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial

Product ID: PFT230UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, silicone, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, silicone, DOE industrial

Product ID: PFT230US
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings, No Bubble Test

Product ID: PFT230USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, silicone, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, silicone, SOE flat closed end external 222 O-rings

Product ID: PFT230USM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, Fluorocarbon Elastomer

Product ID: PFT220UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II Filter Cartridge, PFT230USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT230USM7W480

Product ID: PFT230USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 40 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 40 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT240UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 30 Inches, Expanded PTFE gaskets FEP encapsulated silicone Orings

Product ID: PFT230UTM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 222 O-rings

Product ID: PFT240USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
731 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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