Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

CRTG PRS020H21-X

Product ID: PRS020H21X
Unit of Measure
1/EA
Min Order Qty
1

PRS200H21

Product ID: PRS200H21
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

PUY1A008J

Product ID: PUY1A008J
Unit of Measure
1/EA
Min Order Qty
1

UNICAP 10" Profile Star 5µm

Product ID: PUY1A050J
Unit of Measure
1/EA
Min Order Qty
1

CRTG PUY1J006J

Product ID: PUY1J006J
Unit of Measure
1/EA
Min Order Qty
1

PUY1UY045Y1

Product ID: PUY1UY045Y1
Unit of Measure
1/EA
Min Order Qty
1

PUY1UY1000J

Product ID: PUY1UY1000J
Unit of Measure
1/EA
Min Order Qty
1

PUY1UY200H

Product ID: PUY1UY200H
Unit of Measure
1/EA
Min Order Qty
1

PUY1UY200Y1

Product ID: PUY1UY200Y1
Unit of Measure
1/EA
Min Order Qty
1

Profile® UP Filter Cartridges, 10 in, 40 µm, Ethylene Propylene Rubber

Product ID: PUY1UY400WJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Ethylene Propylene Rubber
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PUY1UY100J product photo

PUY1UY100J

Product ID: PUY1UY100J
Unit of Measure
1/EA
Min Order Qty
1
UNICAP 20" PROFILE STAR 1µm product photo

UNICAP 20" PROFILE STAR 1µm

Product ID: PUY2A010J
Unit of Measure
6/EA
Min Order Qty
6
637 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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