Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9

Profile® Nylon, Filter Cartridges, Removal Rating 5 μm, Nylon

Product ID: RGN04FN050
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Nylon
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm

Discontinued

This part is no longer available. Please contact us for more information.
Profile® Nylon, Filter Cartridges, Removal Rating 10 μm, Nylon product photo

Profile® Nylon, Filter Cartridges, Removal Rating 10 μm, Nylon

Product ID: RGN05FN100
Unit of Measure
1/EA
Min Order Qty
1

Profile® Nylon, Filter Cartridges, Removal Rating 20 μm, Nylon, Length 10 Inches

Product ID: RGN1FN200NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Nylon, Length 10 Inches product photo

Profile® Nylon, Filter Cartridges, Nylon, Length 10 Inches

Product ID: RGN1FN150
Unit of Measure
12/EA
Min Order Qty
12

Profile® Nylon, Filter Cartridges, Removal Rating 10 μm, Nylon, Length 10 Inches

Product ID: RGN1FN100
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Profile® Nylon, Filter Cartridges, Removal Rating 40 μm, Nylon, Length 10 Inches

Product ID: RGN1FN400NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Profile® Nylon, Filter Cartridges, Removal Rating 30 μm, Nylon, Length 10 Inches

Product ID: RGN1FN300
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Profile® Nylon, Filter Cartridges, Removal Rating 70 μm, Nylon, Length 10 Inches

Product ID: RGN1FN700NPL
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Profile® Nylon, Filter Cartridges, Removal Rating 70 μm, Nylon, Length 10 Inches

Product ID: RGN1FN700
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Profile® Nylon, Filter Cartridges, Removal Rating 90 μm, Nylon, Length 10 Inches

Product ID: RGN1FN900
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
90 µm
Membrane Material
Nylon
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
See All Attributes

Profile® Nylon, Filter Cartridges, Removal Rating 10 μm, Nylon

Product ID: RGN29FN100
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Nylon
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
637 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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