Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Brand

Profile®

Availability

In Stock

CTRG WF4 PROFILE C18 400 H13

Product ID: WF4P40018H13
Unit of Measure
12/EA
Min Order Qty
12

AB1W00325J

Product ID: AB1W00325J
Unit of Measure
1/EA
Min Order Qty
1

AB1Y0503J

Product ID: AB1Y0503JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB2P10018J

Product ID: AB2P10018JTIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

AB2P40018J

Product ID: AB2P40018J
Unit of Measure
24/EA
Min Order Qty
24

AB2P70018JDUP

Product ID: AB2P70018JDUPTIMMD
Unit of Measure
1/EA
Min Order Qty
1

HC3310FPY40H

Product ID: HC3310FPY40H
Unit of Measure
1/EA
Min Order Qty
1

LP6F

Product ID: LP6F
Unit of Measure
4/EA
Min Order Qty
4

ME3310CPY13H 132

Product ID: ME3310CPY13H132
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPG13H 132

Product ID: ME3310CPG13H132
Unit of Measure
1/EA
Min Order Qty
1

Profile® II Filter Cartridge

Product ID: ME3310FPN40H
Unit of Measure
12/EA
Min Order Qty
12

Profile® II Filter Cartridge

Product ID: ME3310FPN30H
Unit of Measure
24/EA
Min Order Qty
24

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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