Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Ultipor®

Ultipor® GF-HT, TA73HT003A

Product ID: TA73HT003A
Unit of Measure
1/EA
Min Order Qty
1
Food Contact Compliant
No
5EC4888-640 product photo

5EC4888-640

Product ID: 5EC4888640
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

5ESC10670-2U001ZJ-008 product photo

5ESC10670-2U001ZJ-008

Product ID: 5ESC106702U0S00014
Unit of Measure
1/EA
Min Order Qty
1
5ESC10670-2U002J-076 product photo

5ESC10670-2U002J-076

Product ID: 5ESC106702U002J076
Unit of Measure
1/EA
Min Order Qty
1
5ESC10670-3U001ZJ-154 product photo

5ESC10670-3U001ZJ-154

Product ID: 5ESC106703U0S00001
Unit of Measure
1/EA
Min Order Qty
1
5ESC10670-3U6-40ZJ-154 product photo

5ESC10670-3U6-40ZJ-154

Product ID: 5ESC106703U6S00001
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-2U001ZJ-096 product photo

5ESC10770-2U001ZJ-096

Product ID: 5ESC107702U0S00013
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-2U010ZJ-004 product photo

5ESC10770-2U010ZJ-004

Product ID: 5ESC107702U0S00018
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-2U001ZJ-007 product photo

5ESC10770-2U001ZJ-007

Product ID: 5ESC107702U0S00023
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-3U001ZJ-130 product photo

5ESC10770-3U001ZJ-130

Product ID: 5ESC107703U0S00009
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-3U220ZJ-142 product photo

5ESC10770-3U220ZJ-142

Product ID: 5ESC107703U2S00005
Unit of Measure
1/EA
Min Order Qty
1
5ESC10770-4U6-40ZJ-105 product photo

5ESC10770-4U6-40ZJ-105

Product ID: 5ESC107704U6S00001
Unit of Measure
1/EA
Min Order Qty
1
105 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English