Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product ID: AB2ZU010Z3J

Unit of Measure
1/EA
Min Order Qty
1

Product ID: 1128258

Unit of Measure
1/EA
Min Order Qty
1

Product ID: 1129258

Unit of Measure
1/EA
Min Order Qty
1

Product ID: F1128055

Unit of Measure
1/EA
Min Order Qty
1

Product ID: HC9604FRN13HYQ37

Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9604
Family
Supralon
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Supralon GlassFiber 12 micron (Beta 2000) Fluorocarbon 4in 10.16 cm product photo
Product ID: HC7400SRS4Z

Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
12 µm
Membrane Material
Glass Fiber


Unit of Measure
4/EA
Min Order Qty
4

Supralon GlassFiber 7 micron (Beta 2000) Fluorocarbon 16in 40.64 cm product photo
Product ID: HC8900FRN16Z

Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
7 µm
Membrane Material
Glass Fiber

Supralon GlassFiber 7 micron (Beta 2000) Fluorocarbon 8in 20.32cm product photo
Product ID: HC9604FRN8Z

Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
7 µm
Membrane Material
Glass Fiber

Supralon GlassFiber 12 micron (Beta 2000) Fluorocarbon 39in 99.06 cm product photo
Product ID: HC8300FRS39Z

Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
12 µm
Membrane Material
Glass Fiber

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 20 Inches product photo
Product ID: HFU620UY100J

Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20.7/526 inches/mm
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
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Product ID: HFU660CAS010JUW

Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
1 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Pleated Polypropylene / PES Membrane
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets