Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Food & Beverage

Poly-Fine® II Filter Cartridge, PFT04510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04510USM7W480

Product ID: PFT04510USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Nexis® T Series Filter Cartridges, NXT2030UM7WS480 product photo

Nexis® T Series Filter Cartridges, Polypropylene, 20 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT2030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Seitz® FB Series Depth Filter Sheets, AKS FB 600x612 o. SB

Product ID: B04994
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
23.6” x 24.1”
Size (Metric)
600 mm x 612 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® FB Series Depth Filter Sheets, AKS FB 600x612 m. SB

Product ID: B04999
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
23.6” x 24.1”
Size (Metric)
600 mm x 612 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® FB Series Depth Filter Sheets, AKS FB 400x400 m. SB

Product ID: B05021
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
15.8” x 15.8”
Size (Metric)
400 mm x 400 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® FB Series Depth Filter Sheets, AKS FB 400x400 o. SB

Product ID: B05022
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
15.8” x 15.8”
Size (Metric)
400 mm x 400 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® HS 6000 Series Depth Filter Sheets 400 x 400

Product ID: 1436040
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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HS 9000 400x400 OL in cartons

Product ID: 1439025
Unit of Measure
1/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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SUPRApak PH 7200 SW

Product ID: 5302915/S
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
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SUPRApak PH 7200 MW

Product ID: 5302915/M
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
285 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
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SUPRApak PH 5700 SW

Product ID: 5303055/S
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
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SUPRApak PH 5700 MW

Product ID: 5303055/M
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
285 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
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409 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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