Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Filter Cartridges

Filter Media

Polypropylene

Nexis® T Series Filter Cartridges, NXT2030UM7WS480 product photo

Nexis® T Series Filter Cartridges, Polypropylene, 20 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT2030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes
PFT 0.45-40US-M8W 480 product photo

PFT 0.45-40US-M8W 480

Product ID: PFT04540USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PFT 0.8-10US-M3W 480 product photo

PFT0810USM3W480

Product ID: PFT0810USM3W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II Filter Cartridge, PFT0820UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT0820UEW480

Product ID: PFT0820UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
PFT 0.8-30UH-M7W 480 product photo

PFT 0.8-30UH-M7W 480

Product ID: PFT0830UHM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II Filter Cartridge, PFT0830UEM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT0830UEM7W480

Product ID: PFT0830UEM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings, No Bubble Test

Product ID: PFT1030UEM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 2 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial, No Bubble Test

Product ID: PFT220UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
Poly-Fine® II Filter Cartridge, PFT230USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT230USM7W480

Product ID: PFT230USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
2 µm
PFT 30-30US-M8W 480 product photo

PFT 30-30US-M8W 480

Product ID: PFT3030USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches, Nitrile

Product ID: PFT320UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II Filter Cartridge, PFT330USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT330USM7W480

Product ID: PFT330USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 µm
93 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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