Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Type

Filter Sheets

Seitz® K Series Depth Filter Sheets, K 200 600x612

Product ID: B01090
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
23.6 x 24.1 in
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Seitz® K Series Depth Filter Sheets, K 300 600x612

Product ID: B01092
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
23.6 x 24.1 in
See All Attributes

Seitz® K Series Depth Filter Sheets, K 250 600x612

Product ID: B01091
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
23.6 x 24.1 in
See All Attributes

Seitz® K Series Depth Filter Sheets, K 250 400X400

Product ID: B01106
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® FB Series Depth Filter Sheets, AKS FB 600x612 m. SB

Product ID: B04999
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
23.6” x 24.1”
Size (Metric)
600 mm x 612 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
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Seitz® FB Series Depth Filter Sheets, AKS FB 600x612 o. SB

Product ID: B04994
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
23.6” x 24.1”
Size (Metric)
600 mm x 612 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
See All Attributes

Seitz® AKS4 Series Depth Filter Sheets, AKS 4 m. SB 400x400

Product ID: B05019
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated carbon Kieselguhr and CelluloseF ibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Size (Imperial)
15.8 x 15.8 in
Size (Metric)
400 x 400 mm
See All Attributes

Seitz® FB Series Depth Filter Sheets, AKS FB 400x400 m. SB

Product ID: B05021
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
15.8” x 15.8”
Size (Metric)
400 mm x 400 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
See All Attributes

Seitz® FB Series Depth Filter Sheets, AKS FB 400x400 o. SB

Product ID: B05022
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Activated Carbon and Cellulose Fibers
Hot Water Sanitization
90 °C
Size (Imperial)
15.8” x 15.8”
Size (Metric)
400 mm x 400 mm
Steam Sterilization
125 °C
Food Contact Compliant
Yes
See All Attributes

Seitz® K Series Depth Filter Sheets, K 300 400x400

Product ID: B01105
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
See All Attributes
Seitz® K Series Depth Filter Sheets, K 100 600x612 product photo

Seitz® K Series Depth Filter Sheets, K 100 600x612

Product ID: B07567
Unit of Measure
50/EA
Min Order Qty
50
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
3.95 ft²
Filter Area (Metric)
0.37 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
23.6 x 24.1 in
See All Attributes

Seitz® K Series Depth Filter Sheets, K 150 400x400

Product ID: B07574
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
See All Attributes
42 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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