Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Oil & Gas

Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, No flange

Product ID: PFTM102UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Ultipleat® High Flow Element, HFU660UY100JUW

Product ID: HFU660UY100JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
10 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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7007251 product photo

SUPRAdisc SD II EK 200XEK0C440SP

Product ID: 7007251
Unit of Measure
1/STK
Min Order Qty
1

This product is currently not available. Please contact us for more information.

SUPRAdisc SD II 700 200X700C440SP

Product ID: 7007263
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Marksman™, Large Format Filters, Filter Grade 1.5 µm, Polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: XLDM152UEPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 3 µm, Polypropylene, Size 2 bag, EPDM

Product ID: XLDM32UEPFA
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Polypropylene, Length 40 Inches

Product ID: HFU640UY020JUW
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Polypropylene, Length 40 Inches

Product ID: HFU640UY400JUW
Unit of Measure
1/EA
Min Order Qty
1
8 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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