Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, Fluorocarbon elastomer, Plastic self-adjusting flange, Pall Marksman Series vessels, Rosedale4, Strainrite, Krystil Klear

Product ID: PFTM102UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 1 bag, No flange

Product ID: PFTM401UNF
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 2 bag, Nitrile

Product ID: PFTM402UNPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 90 µm, polypropylene, Size 2 bag, EPDM

Product ID: PFTM902UEPFA
Unit of Measure
4/EA
Min Order Qty
4

PS604HFGH13 ELEMENT

Product ID: PS604HFGH13
Unit of Measure
1/EA
Min Order Qty
8
RC778NZ086Z INDICATOR product photo

RC778NZ086Z INDICATOR

Product ID: RC778NZ086Z
Unit of Measure
1/EA
Min Order Qty
1

L/G Coalescer Retrofit, 24.76in length, 3.75in diameter

Product ID: RDLLG424GFV
Unit of Measure
6/EA
Min Order Qty
6
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
2 bar
Maximum differential pressure rating (psid)
30 psid
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, Polypropylene, FluorocarbonElastomer

Product ID: C001AW30UVM3
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 29.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 29.5 Inches, 316 stainless steel

Product ID: C075AW295S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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ELEMENT 12” U010Z 1 MICRON

Product ID: CA24762D06
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

ELEMENT 12” U2-20Z 2 MICRON

Product ID: CA24762D07
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

882 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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