Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Oil & Gas

Product Type

Coalescers

ELEMENT 12” U2-20Z 2 MICRON

Product ID: CA24762D07
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

ELEMENT 12” U010Z 1 MICRON

Product ID: CA24762D06
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CC1LGA7H13

Product ID: CC1LGA7H13
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
10 in
Coalescer Length (Metric)
25.4 cm
Coalescer Diameter (Imperial)
2.75 in

CC2LGA7H13

Product ID: CC2LGA7H13
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
20 in
Coalescer Length (Metric)
50.8 cm
Coalescer Diameter (Imperial)
2.75 in

CC3LGA7J

Product ID: CC3LGA7J
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
30 in
Coalescer Length (Metric)
76.2 cm
Coalescer Diameter (Imperial)
2.75 in
SepraSol - CC3LGB7H13 product photo

SepraSol L/G Coalescer, 30in length, 2.75in diameter, 99.999% at 0.3µm aerosol rating, 99.99% >0.3µm solids removal rating

Product ID: CC3LGB7H13
Unit of Measure
1/EA
Min Order Qty
1

CC3LGB7H

Product ID: CC3LGB7H
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
30 in
Coalescer Length (Metric)
76.2 cm
Coalescer Diameter (Imperial)
2.75 in

PS604HFGH13 ELEMENT

Product ID: PS604HFGH13
Unit of Measure
1/EA
Min Order Qty
8

L/G Coalescer Retrofit, 24.76in length, 3.75in diameter

Product ID: RDLLG424GFV
Unit of Measure
6/EA
Min Order Qty
6
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
2 bar
Maximum differential pressure rating (psid)
30 psid
See All Attributes

SepraSol Plus L/G Coalescer, 40in length, 6in diameter, 99.999% at 0.3µm aerosol rating, 99.7% >0.3µm solids removal rating

Product ID: CS604LGBH13
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

SepraSol Plus L/G Coalescer, 40in length, 6in diameter, 99.999% at 0.3µm aerosol rating, 99.7% >0.3µm solids removal rating

Product ID: CS604LGBH1
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes

SepraSol Plus L/G Coalescer, 40in length, 6in diameter, 99.999% at 0.3µm aerosol rating, 99.7% >0.3µm solids removal rating

Product ID: CS604LGBH
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes
79 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English