Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Oil & Gas

Product Type

Large Format Filters

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Pleated Polypropylene Depth Structure, Length 20 Inches, Ethylene Propylene O-ring Material

Product ID: HFU620UY400J
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Filter Grade 2 µm, Resinbondedglassfiber, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640GF020J
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Resinbondedglassfiber, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640GF200H13
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Polypropylene, Length 40 Inches

Product ID: HFU640UY020JUW
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640UY400H13
Unit of Measure
4/EA
Min Order Qty
4
FEATURED

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640UY100H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Polypropylene, Length 40 Inches

Product ID: HFU640UY400JUW
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Polypropylene, Length 40 Inches, Ethylene Propylene Rubber O-ring Seal

Product ID: HFU640UY700JUW
Unit of Measure
1/EA
Min Order Qty
1

Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, EPDM, Plastic self-adjusting flange, Pall Marksman Series vessels Rosedale4 Strainrite Krystil Klear5

Product ID: PFTM102UEPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 2 Bag, Nitrile, Plastic self-adjusting flange, FSI BFNP Seri es vessels (side entry) GAF6

Product ID: PFTM102UNPFB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 Bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 10 µm, Polypropylene, Size 2 Bag, Nitrile, Plastic self-adjusting flange, Pall Marksman Series vessels Rosedale4 Strainrite Krystil Klear5

Product ID: PFTM102UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 Bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, No flange

Product ID: PFTM102UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes
55 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English