Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Oil & Gas

Featured product

false

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
See All Attributes

10RPN20

Product ID: 10RPN20
Unit of Measure
1/EA
Min Order Qty
1

Discontinued

This part is no longer available. Please contact us for more information.

OenoFlow FIT extensions modules US

Product ID: 20054148
Unit of Measure
1/EA
Min Order Qty
1

OenoFlow FIT Module T1

Product ID: 20054387
Unit of Measure
1/EA
Min Order Qty
1

Oenoflow FIT systems for US inventory

Product ID: 20054364
Unit of Measure
1/EA
Min Order Qty
1

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 2 bag, Nitrile

Product ID: PFTM402UNPFA
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 40 µm, polypropylene, Size 2 bag, No flange

Product ID: PFTM402UNF
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 5 µm, polypropylene, Size 2 bag, No flange

Product ID: PFTM52UNF
Unit of Measure
4/EA
Min Order Qty
4

Marksman™, Large Format Filters, Filter Grade 5 µm, Polypropylene, Size 2 Bag, Nitrile

Product ID: PFTM52UNPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 Bag
Filter Grade
5 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Marksman™, Large Format Filters, Filter Grade 90 µm, polypropylene, Size 2 bag, EPDM

Product ID: PFTM902UEPFA
Unit of Measure
4/EA
Min Order Qty
4

AquaSep Plus L/L Coalescer, 20in length, 3.75in diameter, ≤15ppm separation level

Product ID: LCS2B1AH
Unit of Measure
8/EA
Min Order Qty
8
Maximum Operating Temperature (F)
150 °F
Maximum Operating Temperature (C)
66 °C
Change out pressure drop (bar)
1.03 bar
Change out pressure drop (psid)
15 psid
Maximum differential pressure rating (bar)
3.5 bar
Maximum differential pressure rating (psid)
50 psid
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess product photo

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess

Product ID: NXT110UM20E
Unit of Measure
30/EA
Min Order Qty
30
Micron
1 micron
881 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English