Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
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HC8800FKT8H

Product ID: HC8800FKT8H
Unit of Measure
6/EA
Min Order Qty
6

Ultipor® III Filter Element

Product ID: HC8900FKT8Z
Unit of Measure
6/EA
Min Order Qty
6

HC9404FMZ8H

Product ID: HC9404FMZ8H
Unit of Measure
1/EA
Min Order Qty
1

HC9801FDN4H

Product ID: HC9801FDN4H
Unit of Measure
1/EA
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1

BR 25-20 246

Product ID: BR2520246
Unit of Measure
18/EA
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18

Discontinued

This part is no longer available. Please contact us for more information.
CTRG BW HDC HS-40 C7 40" product photo

CTRG BW HDC HS-40 C7 40

Product ID: BWAB4P1000XHS
Unit of Measure
1/EA
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1

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CTRG BW HDC H050 C7 H 3H product photo

CTRG BW HDC H050 C7 H 3H

Product ID: BWAB3P050XHS
Unit of Measure
1/EA
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1

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CTRG BW HDC H400 C7 (4-HIGH) product photo

CTRG BW HDC H400 C7 (4-HIGH)

Product ID: BWAB4P400XHS
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1/EA
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1

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C001A975A product photo

C001A9.75A

Product ID: C001A975A
Unit of Measure
30/EA
Min Order Qty
30
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, Electrolytic tin plated steel

Product ID: C001A10T
Unit of Measure
30/EA
Min Order Qty
30
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 304 stainless steel

Product ID: C001A10A
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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4,147 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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