Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

RT250A10S product photo

RT250A10S

Product ID: RT250A10S
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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STRINGWOUND FILTER

Product ID: FNC50R30T
Unit of Measure
1/EA
Min Order Qty
1
FNC10R40SE product photo

FNC10R40SE

Product ID: FNC10R40SE
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Cartridge, Stringwound, Nylon, 5 um, 30

Product ID: FP FNY5R30A-E
Unit of Measure
15/EA
Min Order Qty
15

RING BK UP -235 PARKER

Product ID: FP390692
Unit of Measure
1/EA
Min Order Qty
1

RING BK UP -130 PARKER

Product ID: FP390691
Unit of Measure
1/EA
Min Order Qty
1
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 316 stainless steel

Product ID: G001AW195S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 29.5 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 29.5 Inches, 316 stainless steel

Product ID: G001AW295S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 316 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 316 stainless steel, Individually wrapped

Product ID: G001AW40S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel

Product ID: G001A10S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 2 μm, Length 40 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 2 μm, Length 40 Inches, 316 stainless steel

Product ID: G002AW40S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 28 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 28 Inches

Product ID: G001DW28S1PK
Unit of Measure
12/EA
Min Order Qty
12
Packaging
Individually wrapped
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4,147 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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