Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Cartridge Length (Imperial)

30 in

Product Type

Filter Cartridges

Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3U220Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, Nitrile, DOE 2.54 cm (1 in) extended core

Product ID: DFN1030AN1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
End Configuration Code
1X
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HDC® II, Filter Cartridges, Removal Rating 40 μm, Length 30 Inches, silicone

Product ID: AB3J4007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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HDC® II, Filter Cartridges, Removal Rating 4.5 μm, Length 30 Inches, silicone

Product ID: AB3J0457H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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HDC® II, Filter Cartridges, Removal Rating 70 μm, Length 30 Inches

Product ID: AB3J7007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
70 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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HDC® II, Filter Cartridges, Removal Rating 2.5 μm, Length 30 Inches

Product ID: AB3J0257H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
2.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches, silicone, Dual 222 size O-rings finned end

Product ID: AB3U010Z8H4
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Ultipor® GF Plus, Filter Cartridges, Length 30 Inches

Product ID: AB3U640Z7H13
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
H13
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Profile® UP Filter Cartridges, 30 in, 10 µm, Silicone Elastomer

Product ID: AB3UY1007WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches

Product ID: C001AW30SNM3S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 316 stainless steel, with Core Cover product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 30 Inches, 316 stainless steel, with Core Cover

Product ID: C005AW30SC
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Bleached cotton, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Bleached cotton, Length 30 Inches, 316 stainless steel

Product ID: C001AW30S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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64 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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