Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Gasket / O-Ring Material

Ethylene Propylene Steam Service

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps

Product ID: NXT0530UDOET
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene Steam Service
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps

Product ID: NXT10010UDOET
Unit of Measure
60/EA
Min Order Qty
60
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps

Product ID: NXT1010UDOET
Unit of Measure
30/EA
Min Order Qty
30
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE - DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE - DOE with elastomer gasket seals and end caps

Product ID: NXT15010UDOET
Unit of Measure
30/EA
Min Order Qty
30
Micron
150 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps

Product ID: NXT5010UDOET
Unit of Measure
60/EA
Min Order Qty
60
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, SOE flat closed end external 222 O-rings

Product ID: NXT5010UM3T
Unit of Measure
60/EA
Min Order Qty
60
Micron
50 micron

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, SOE flat closed end external 222 O-rings

Product ID: NXT5020UM3T
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Ethylene Propylene Steam Service
See All Attributes
NXT 5-10U-DOET product photo

Nexis, NXT, 5 μm, 25.4 cm (10 in), DOE with elastomer gasket seals and end caps, Expanded PTFE (gaskets) - DOE option FEP encapsulated silicone (O-rings) - SOE option

Product ID: NXT510UDOET
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
8 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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