Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

Gasket / O-Ring Material

FEP encapsulated fluorocarbon elastomer (O-rings)

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA0510UM3F
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, FEP encapsulated fluorocarbon elastomer Orings product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA2030UM8F
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, FEP encapsulated fluorocarbon elastomer Orings

Product ID: NXA520UM7F
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, FEP encapsulated Fluorocarbon Elastomer Orings product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, FEP encapsulated Fluorocarbon Elastomer Orings

Product ID: NXT0530UM26F
Unit of Measure
24/EA
Min Order Qty
24
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 27.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 27.25 inches

Product ID: NXT1002725UM18F
Unit of Measure
12/EA
Min Order Qty
12
Micron
100 micron

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: NXT10010UM3F
Unit of Measure
30/EA
Min Order Qty
60
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
FEP encapsulated fluorocarbon elastomer (O-rings)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 16.25 inches

Product ID: NXT101625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: NXT1020UM3F
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, M18 - SOE flat closed end, external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, M18 - SOE flat closed end, external 222 O-ring

Product ID: NXT15010UM18F
Unit of Measure
30/EA
Min Order Qty
30
Micron
150 micron
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 16.25 inches

Product ID: NXT1501625UM3F
Unit of Measure
12/EA
Min Order Qty
12
Micron
150 micron
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 27.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 27.25 inches

Product ID: NXT1502725UM18F
Unit of Measure
12/EA
Min Order Qty
12
Micron
150 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 16.25 inches

Product ID: NXT2001625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
200 micron
69 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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