Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Housings, Vessels, and Assemblies

SUPRApak Housing Torque Unit Vented

Product ID: ACS1040AA
Unit of Measure
1/EA
Min Order Qty
1

KIT ACS1050EA DN65 DIN 11851 GASKET

Product ID: ACS1050EA
Unit of Measure
1/EA
Min Order Qty
1

Athalon, 217psi Non-bypass Duplex Hsg, 4in Flange Ports, 40in Length, Nitrile Seals

Product ID: AFV07DJ04HNCN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Flange (150 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
217 psi
Port Size
4 in
Number of Cartridges
7 per side
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AFV07DJ04HB-CN

Product ID: AFV07DJ04HBCN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Flange (150 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
217 psi
Port Size
4 in
Number of Cartridges
7 per side
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HOUSING ALTA06M67535 product photo

HOUSING ALTA06M67535

Product ID: ALTA06M67535
Unit of Measure
1/EA
Min Order Qty
1
118210151, Hardened Washer product photo

118210151, Hardened Washer

Product ID: 118210151
Unit of Measure
1/EA
Min Order Qty
1

V-BAND KIT FOR SUPRApak L HOUSINGS

Product ID: 20005766-K
Unit of Measure
1/EA
Min Order Qty
1

EWHF16G89ZZJ

Product ID: EWHF16G89ZZJ
Unit of Measure
1/EA
Min Order Qty
1

Ultipor, 250psi Simplex Hsg, 1in BSP Ports, Nitrile Seals

Product ID: HH7400C16B1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Discontinued

This part is no longer available. Please contact us for more information.

Ultipor, 250psi Simplex Hsg, 1in BSP Ports, Nitrile Seals

Product ID: HH7400C16A1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Family
Ultipor
Pressure Rating
250 psi
Port Size
1 in
Number of Cartridges
1
Material of Construction
Cast Iron
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Ultipor, 1200psi Duplex Hsg, 1.25in BSP Ports, 8in Length, Nitrile Seals

Product ID: HH8670C20SB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
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This product is currently not available. Please contact us for more information.

Ultipor, 1200psi Duplex Hsg, 1.25in Flange Ports, 13in Length, Nitrile Seals

Product ID: HH8670F20TB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (300 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
1200 psi
Port Size
1.25 in
Number of Cartridges
1 per side
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This product is currently not available. Please contact us for more information.

729 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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