Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Large Format Filters

Ultipleat® High Flow, Large Format Filters, Filter Grade 2 µm, Resinbondedglassfiber, Length 20 Inches, Nitrile O-ring Material

Product ID: HFU620GF020H13
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Pleated Polypropylene Depth Structure, Length 20 Inches, Ethylene Propylene O-ring Material

Product ID: HFU620UY200J
Unit of Measure
4/EA
Min Order Qty
4

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Pleated Polypropylene Depth Structure, Length 20 Inches, Ethylene Propylene O-ring Material

Product ID: HFU620UY400J
Unit of Measure
1/EA
Min Order Qty
1

Ultipleat® High Flow, Large Format Filters, Filter Grade 2 µm, Resinbondedglassfiber, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640GF020J
Unit of Measure
4/EA
Min Order Qty
4

Vector, Polyester Media Material with 5 µm (micron) Filter Grade

Product ID: HFV620PE005PJ
Unit of Measure
6/EA
Min Order Qty
6
Cartridge Length
20/508 inch/mm
Filter Grade
5 µm
Hardware Material
White polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector, Polyester Media Material with 10 µm (micron) Filter Grade

Product ID: HFV640PE010AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
10 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector, Polyester Media Material with 50 µm (micron) Filter Grade

Product ID: HFV640PE050AH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
50 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 10 µm, Polypropylene, Length 20 inches

Product ID: HFV620PP010PH13
Unit of Measure
6/EA
Min Order Qty
6
Cartridge Length
20/508 inch/mm
Filter Grade
10 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector, Polyester Media Material with 1 µm (micron) Filter Grade

Product ID: HFV640PE001AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Filter Grade 10 µm, polypropylene, Size 2 bag, Fluorocarbon elastomer, Plastic self-adjusting flange, Pall Marksman Series vessels, Rosedale4, Strainrite, Krystil Klear

Product ID: PFTM102UVPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 10 µm, polypropylene, Length 60 Inches, 10% glass fiber reinforced polypropylene End caps

Product ID: PFTM1060UHFH1
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 20 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM2020UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes
787 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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